6/27/2012	8:16:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	8:16:46 AM	Recipe started at 8:16 AM
6/27/2012	8:16:46 AM	Helium valve closed
6/27/2012	8:16:46 AM	H2 valve closed
6/27/2012	8:16:46 AM	BCl3 valve closed
6/27/2012	8:16:46 AM	PH3 valve closed
6/27/2012	8:16:46 AM	SiCl4 pre valve closed
6/27/2012	8:16:46 AM	SiCl4 post valve closed
6/27/2012	8:16:46 AM	Main Vac valve closed
6/27/2012	8:16:46 AM	Bypass valve closed
6/27/2012	8:16:46 AM	Bubbler valve closed
6/27/2012	8:16:46 AM	Helium MFC set to  0.000000
6/27/2012	8:16:46 AM	H2 MFC set to  0.000000
6/27/2012	8:16:46 AM	BCl3 MFC set to  0.000000
6/27/2012	8:16:46 AM	PH3 MFC set to  0.000000
6/27/2012	8:16:46 AM	SiCl4 MFC set to  0.000000
6/27/2012	8:16:46 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:16:47 AM	Tube furnace set to 0
6/27/2012	8:16:50 AM	H2 valve closed
6/27/2012	8:16:50 AM	BCl3 valve closed
6/27/2012	8:16:50 AM	PH3 valve closed
6/27/2012	8:16:50 AM	SiCl4 pre valve closed
6/27/2012	8:16:50 AM	SiCl4 post valve closed
6/27/2012	8:16:50 AM	Main Vac valve closed
6/27/2012	8:16:50 AM	Bypass valve closed
6/27/2012	8:16:50 AM	Bubbler valve closed
6/27/2012	8:16:50 AM	Helium valve opened
6/27/2012	8:16:50 AM	Helium MFC set to  500.000000
6/27/2012	8:16:50 AM	H2 MFC set to  0.000000
6/27/2012	8:16:50 AM	BCl3 MFC set to  0.000000
6/27/2012	8:16:50 AM	PH3 MFC set to  0.000000
6/27/2012	8:16:50 AM	SiCl4 MFC set to  0.000000
6/27/2012	8:16:50 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:16:50 AM	Tube furnace set to 0
6/27/2012	8:18:03 AM	Helium valve closed
6/27/2012	8:18:03 AM	H2 valve closed
6/27/2012	8:18:03 AM	BCl3 valve closed
6/27/2012	8:18:03 AM	PH3 valve closed
6/27/2012	8:18:03 AM	SiCl4 pre valve closed
6/27/2012	8:18:03 AM	SiCl4 post valve closed
6/27/2012	8:18:03 AM	Main Vac valve closed
6/27/2012	8:18:03 AM	Bypass valve closed
6/27/2012	8:18:03 AM	Bubbler valve closed
6/27/2012	8:18:03 AM	Helium MFC set to  0.000000
6/27/2012	8:18:03 AM	H2 MFC set to  0.000000
6/27/2012	8:18:03 AM	BCl3 MFC set to  0.000000
6/27/2012	8:18:03 AM	PH3 MFC set to  0.000000
6/27/2012	8:18:03 AM	SiCl4 MFC set to  0.000000
6/27/2012	8:18:03 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:18:03 AM	Tube furnace set to 0
6/27/2012	8:18:04 AM	Run finished at 8:18 AM
6/27/2012	8:18:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	8:27:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	8:27:03 AM	Recipe started at 8:27 AM
6/27/2012	8:27:03 AM	Helium valve closed
6/27/2012	8:27:03 AM	H2 valve closed
6/27/2012	8:27:03 AM	BCl3 valve closed
6/27/2012	8:27:03 AM	PH3 valve closed
6/27/2012	8:27:03 AM	SiCl4 pre valve closed
6/27/2012	8:27:03 AM	SiCl4 post valve closed
6/27/2012	8:27:03 AM	Main Vac valve closed
6/27/2012	8:27:03 AM	Bubbler valve closed
6/27/2012	8:27:03 AM	Bypass valve opened
6/27/2012	8:27:03 AM	Helium MFC set to  0.000000
6/27/2012	8:27:03 AM	H2 MFC set to  0.000000
6/27/2012	8:27:03 AM	BCl3 MFC set to  0.000000
6/27/2012	8:27:03 AM	PH3 MFC set to  0.000000
6/27/2012	8:27:03 AM	SiCl4 MFC set to  0.000000
6/27/2012	8:27:03 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:27:03 AM	Tube furnace set to 0
6/27/2012	8:28:10 AM	Helium valve closed
6/27/2012	8:28:10 AM	H2 valve closed
6/27/2012	8:28:10 AM	BCl3 valve closed
6/27/2012	8:28:10 AM	PH3 valve closed
6/27/2012	8:28:10 AM	SiCl4 pre valve closed
6/27/2012	8:28:10 AM	SiCl4 post valve closed
6/27/2012	8:28:10 AM	Main Vac valve closed
6/27/2012	8:28:10 AM	Bubbler valve closed
6/27/2012	8:28:10 AM	Bypass valve opened
6/27/2012	8:28:10 AM	Helium MFC set to  0.000000
6/27/2012	8:28:10 AM	H2 MFC set to  0.000000
6/27/2012	8:28:10 AM	BCl3 MFC set to  0.000000
6/27/2012	8:28:10 AM	PH3 MFC set to  0.000000
6/27/2012	8:28:10 AM	SiCl4 MFC set to  0.000000
6/27/2012	8:28:10 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:28:10 AM	Tube furnace set to 0
6/27/2012	8:29:11 AM	Helium valve closed
6/27/2012	8:29:11 AM	H2 valve closed
6/27/2012	8:29:11 AM	BCl3 valve closed
6/27/2012	8:29:11 AM	PH3 valve closed
6/27/2012	8:29:11 AM	SiCl4 pre valve closed
6/27/2012	8:29:11 AM	SiCl4 post valve closed
6/27/2012	8:29:11 AM	Bypass valve closed
6/27/2012	8:29:11 AM	Bubbler valve closed
6/27/2012	8:29:11 AM	Main Vac valve opened
6/27/2012	8:29:11 AM	Helium MFC set to  0.000000
6/27/2012	8:29:11 AM	H2 MFC set to  0.000000
6/27/2012	8:29:11 AM	BCl3 MFC set to  0.000000
6/27/2012	8:29:11 AM	PH3 MFC set to  0.000000
6/27/2012	8:29:11 AM	SiCl4 MFC set to  0.000000
6/27/2012	8:29:11 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:29:11 AM	Tube furnace set to 0
6/27/2012	8:29:12 AM	Run finished at 8:29 AM
6/27/2012	8:29:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	9:37:08 AM	Main Vac valve closed
6/27/2012	9:37:20 AM	Main Vac valve opened
6/27/2012	9:40:50 AM	Recipe started at 9:40 AM
6/27/2012	9:40:50 AM	Helium valve closed
6/27/2012	9:40:50 AM	H2 valve closed
6/27/2012	9:40:50 AM	BCl3 valve closed
6/27/2012	9:40:50 AM	PH3 valve closed
6/27/2012	9:40:50 AM	SiCl4 pre valve closed
6/27/2012	9:40:50 AM	SiCl4 post valve closed
6/27/2012	9:40:50 AM	Bypass valve closed
6/27/2012	9:40:50 AM	Bubbler valve closed
6/27/2012	9:40:50 AM	Main Vac valve opened
6/27/2012	9:40:50 AM	Helium MFC set to  0.000000
6/27/2012	9:40:50 AM	H2 MFC set to  0.000000
6/27/2012	9:40:50 AM	BCl3 MFC set to  0.000000
6/27/2012	9:40:50 AM	PH3 MFC set to  0.000000
6/27/2012	9:40:50 AM	SiCl4 MFC set to  0.000000
6/27/2012	9:40:50 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	9:40:50 AM	Tube furnace set to 0
6/27/2012	9:40:53 AM	Helium valve closed
6/27/2012	9:40:53 AM	H2 valve closed
6/27/2012	9:40:53 AM	BCl3 valve closed
6/27/2012	9:40:53 AM	PH3 valve closed
6/27/2012	9:40:53 AM	SiCl4 pre valve closed
6/27/2012	9:40:53 AM	SiCl4 post valve closed
6/27/2012	9:40:53 AM	Main Vac valve closed
6/27/2012	9:40:53 AM	Bypass valve closed
6/27/2012	9:40:53 AM	Bubbler valve closed
6/27/2012	9:40:53 AM	Helium MFC set to  0.000000
6/27/2012	9:40:53 AM	H2 MFC set to  0.000000
6/27/2012	9:40:53 AM	BCl3 MFC set to  0.000000
6/27/2012	9:40:53 AM	PH3 MFC set to  0.000000
6/27/2012	9:40:53 AM	SiCl4 MFC set to  0.000000
6/27/2012	9:40:53 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	9:40:53 AM	Tube furnace set to 0
6/27/2012	9:40:56 AM	Helium valve closed
6/27/2012	9:40:56 AM	BCl3 valve closed
6/27/2012	9:40:56 AM	PH3 valve closed
6/27/2012	9:40:56 AM	SiCl4 pre valve closed
6/27/2012	9:40:56 AM	SiCl4 post valve closed
6/27/2012	9:40:56 AM	Main Vac valve closed
6/27/2012	9:40:56 AM	Bypass valve closed
6/27/2012	9:40:56 AM	Bubbler valve closed
6/27/2012	9:40:56 AM	H2 valve opened
6/27/2012	9:40:56 AM	Helium MFC set to  0.000000
6/27/2012	9:40:56 AM	H2 MFC set to  500.000000
6/27/2012	9:40:56 AM	BCl3 MFC set to  0.000000
6/27/2012	9:40:56 AM	PH3 MFC set to  0.000000
6/27/2012	9:40:56 AM	SiCl4 MFC set to  0.000000
6/27/2012	9:40:56 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	9:40:56 AM	Tube furnace set to 0
6/27/2012	9:42:12 AM	Helium valve closed
6/27/2012	9:42:12 AM	BCl3 valve closed
6/27/2012	9:42:12 AM	PH3 valve closed
6/27/2012	9:42:12 AM	SiCl4 pre valve closed
6/27/2012	9:42:12 AM	SiCl4 post valve closed
6/27/2012	9:42:12 AM	Main Vac valve closed
6/27/2012	9:42:12 AM	Bypass valve closed
6/27/2012	9:42:12 AM	H2 valve opened
6/27/2012	9:42:12 AM	Bubbler valve opened
6/27/2012	9:42:12 AM	Helium MFC set to  0.000000
6/27/2012	9:42:12 AM	H2 MFC set to  500.000000
6/27/2012	9:42:12 AM	BCl3 MFC set to  0.000000
6/27/2012	9:42:12 AM	PH3 MFC set to  0.000000
6/27/2012	9:42:12 AM	SiCl4 MFC set to  0.000000
6/27/2012	9:42:12 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	9:42:13 AM	Tube furnace set to 0
6/27/2012	9:42:14 AM	Helium valve closed
6/27/2012	9:42:14 AM	BCl3 valve closed
6/27/2012	9:42:14 AM	PH3 valve closed
6/27/2012	9:42:14 AM	SiCl4 pre valve closed
6/27/2012	9:42:14 AM	SiCl4 post valve closed
6/27/2012	9:42:14 AM	Main Vac valve closed
6/27/2012	9:42:14 AM	Bypass valve closed
6/27/2012	9:42:14 AM	H2 valve opened
6/27/2012	9:42:14 AM	Bubbler valve opened
6/27/2012	9:42:14 AM	Helium MFC set to  0.000000
6/27/2012	9:42:14 AM	H2 MFC set to  500.000000
6/27/2012	9:42:14 AM	BCl3 MFC set to  0.000000
6/27/2012	9:42:14 AM	PH3 MFC set to  0.000000
6/27/2012	9:42:14 AM	SiCl4 MFC set to  0.000000
6/27/2012	9:42:14 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	9:42:14 AM	Tube furnace set to 1000
6/27/2012	10:07:14 AM	Helium valve closed
6/27/2012	10:07:14 AM	PH3 valve closed
6/27/2012	10:07:14 AM	Main Vac valve closed
6/27/2012	10:07:14 AM	Bypass valve closed
6/27/2012	10:07:14 AM	H2 valve opened
6/27/2012	10:07:14 AM	BCl3 valve opened
6/27/2012	10:07:14 AM	SiCl4 pre valve opened
6/27/2012	10:07:14 AM	SiCl4 post valve opened
6/27/2012	10:07:14 AM	Bubbler valve opened
6/27/2012	10:07:14 AM	Helium MFC set to  0.000000
6/27/2012	10:07:14 AM	H2 MFC set to  450.000000
6/27/2012	10:07:14 AM	BCl3 MFC set to  0.750000
6/27/2012	10:07:14 AM	PH3 MFC set to  0.000000
6/27/2012	10:07:14 AM	SiCl4 MFC set to  50.000000
6/27/2012	10:07:14 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:07:14 AM	Tube furnace set to 1000
6/27/2012	10:40:14 AM	Helium valve closed
6/27/2012	10:40:14 AM	BCl3 valve closed
6/27/2012	10:40:14 AM	PH3 valve closed
6/27/2012	10:40:14 AM	SiCl4 pre valve closed
6/27/2012	10:40:14 AM	SiCl4 post valve closed
6/27/2012	10:40:14 AM	Main Vac valve closed
6/27/2012	10:40:14 AM	Bypass valve closed
6/27/2012	10:40:14 AM	H2 valve opened
6/27/2012	10:40:14 AM	Bubbler valve opened
6/27/2012	10:40:14 AM	Helium MFC set to  0.000000
6/27/2012	10:40:14 AM	H2 MFC set to  500.000000
6/27/2012	10:40:14 AM	BCl3 MFC set to  0.000000
6/27/2012	10:40:14 AM	PH3 MFC set to  0.000000
6/27/2012	10:40:14 AM	SiCl4 MFC set to  0.000000
6/27/2012	10:40:14 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:40:14 AM	Tube furnace set to 750
6/27/2012	10:55:14 AM	H2 valve closed
6/27/2012	10:55:14 AM	BCl3 valve closed
6/27/2012	10:55:14 AM	PH3 valve closed
6/27/2012	10:55:14 AM	SiCl4 pre valve closed
6/27/2012	10:55:14 AM	SiCl4 post valve closed
6/27/2012	10:55:14 AM	Main Vac valve closed
6/27/2012	10:55:14 AM	Bypass valve closed
6/27/2012	10:55:14 AM	Helium valve opened
6/27/2012	10:55:14 AM	Bubbler valve opened
6/27/2012	10:55:14 AM	Helium MFC set to  500.000000
6/27/2012	10:55:14 AM	H2 MFC set to  0.000000
6/27/2012	10:55:14 AM	BCl3 MFC set to  0.000000
6/27/2012	10:55:14 AM	PH3 MFC set to  0.000000
6/27/2012	10:55:14 AM	SiCl4 MFC set to  0.000000
6/27/2012	10:55:14 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:55:14 AM	Tube furnace set to 0
6/27/2012	11:15:14 AM	Helium valve closed
6/27/2012	11:15:14 AM	H2 valve closed
6/27/2012	11:15:14 AM	BCl3 valve closed
6/27/2012	11:15:15 AM	PH3 valve closed
6/27/2012	11:15:15 AM	SiCl4 pre valve closed
6/27/2012	11:15:15 AM	SiCl4 post valve closed
6/27/2012	11:15:15 AM	Main Vac valve closed
6/27/2012	11:15:15 AM	Bypass valve closed
6/27/2012	11:15:15 AM	Bubbler valve closed
6/27/2012	11:15:15 AM	Helium MFC set to  0.000000
6/27/2012	11:15:15 AM	H2 MFC set to  0.000000
6/27/2012	11:15:15 AM	BCl3 MFC set to  0.000000
6/27/2012	11:15:15 AM	PH3 MFC set to  0.000000
6/27/2012	11:15:15 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:15:15 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:15:15 AM	Tube furnace set to 0
6/27/2012	11:24:22 AM	Helium valve closed
6/27/2012	11:24:22 AM	H2 valve closed
6/27/2012	11:24:22 AM	BCl3 valve closed
6/27/2012	11:24:22 AM	PH3 valve closed
6/27/2012	11:24:22 AM	SiCl4 pre valve closed
6/27/2012	11:24:22 AM	SiCl4 post valve closed
6/27/2012	11:24:22 AM	Main Vac valve closed
6/27/2012	11:24:22 AM	Bubbler valve closed
6/27/2012	11:24:22 AM	Bypass valve opened
6/27/2012	11:24:22 AM	Helium MFC set to  0.000000
6/27/2012	11:24:22 AM	H2 MFC set to  0.000000
6/27/2012	11:24:22 AM	BCl3 MFC set to  0.000000
6/27/2012	11:24:22 AM	PH3 MFC set to  0.000000
6/27/2012	11:24:22 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:24:22 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:24:23 AM	Tube furnace set to 0
6/27/2012	11:25:18 AM	Helium valve closed
6/27/2012	11:25:18 AM	H2 valve closed
6/27/2012	11:25:18 AM	BCl3 valve closed
6/27/2012	11:25:18 AM	PH3 valve closed
6/27/2012	11:25:18 AM	SiCl4 pre valve closed
6/27/2012	11:25:18 AM	SiCl4 post valve closed
6/27/2012	11:25:18 AM	Main Vac valve closed
6/27/2012	11:25:18 AM	Bubbler valve closed
6/27/2012	11:25:18 AM	Bypass valve opened
6/27/2012	11:25:18 AM	Helium MFC set to  0.000000
6/27/2012	11:25:18 AM	H2 MFC set to  0.000000
6/27/2012	11:25:18 AM	BCl3 MFC set to  0.000000
6/27/2012	11:25:18 AM	PH3 MFC set to  0.000000
6/27/2012	11:25:18 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:25:18 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:25:18 AM	Tube furnace set to 0
6/27/2012	11:26:18 AM	Helium valve closed
6/27/2012	11:26:18 AM	H2 valve closed
6/27/2012	11:26:18 AM	BCl3 valve closed
6/27/2012	11:26:18 AM	PH3 valve closed
6/27/2012	11:26:18 AM	SiCl4 pre valve closed
6/27/2012	11:26:18 AM	SiCl4 post valve closed
6/27/2012	11:26:18 AM	Bypass valve closed
6/27/2012	11:26:18 AM	Bubbler valve closed
6/27/2012	11:26:18 AM	Main Vac valve opened
6/27/2012	11:26:18 AM	Helium MFC set to  0.000000
6/27/2012	11:26:18 AM	H2 MFC set to  0.000000
6/27/2012	11:26:18 AM	BCl3 MFC set to  0.000000
6/27/2012	11:26:18 AM	PH3 MFC set to  0.000000
6/27/2012	11:26:18 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:26:18 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:26:19 AM	Tube furnace set to 0
6/27/2012	11:27:00 AM	Run finished at 11:27 AM
6/27/2012	11:27:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	11:27:05 AM	Recipe started at 11:27 AM
6/27/2012	11:27:05 AM	Helium valve closed
6/27/2012	11:27:05 AM	H2 valve closed
6/27/2012	11:27:06 AM	BCl3 valve closed
6/27/2012	11:27:06 AM	PH3 valve closed
6/27/2012	11:27:06 AM	SiCl4 pre valve closed
6/27/2012	11:27:06 AM	SiCl4 post valve closed
6/27/2012	11:27:06 AM	Main Vac valve closed
6/27/2012	11:27:06 AM	Bypass valve closed
6/27/2012	11:27:06 AM	Bubbler valve closed
6/27/2012	11:27:06 AM	Helium MFC set to  0.000000
6/27/2012	11:27:06 AM	H2 MFC set to  0.000000
6/27/2012	11:27:06 AM	BCl3 MFC set to  0.000000
6/27/2012	11:27:06 AM	PH3 MFC set to  0.000000
6/27/2012	11:27:06 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:27:06 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:27:06 AM	Tube furnace set to 0
6/27/2012	11:27:09 AM	H2 valve closed
6/27/2012	11:27:09 AM	BCl3 valve closed
6/27/2012	11:27:09 AM	PH3 valve closed
6/27/2012	11:27:09 AM	SiCl4 pre valve closed
6/27/2012	11:27:09 AM	SiCl4 post valve closed
6/27/2012	11:27:09 AM	Main Vac valve closed
6/27/2012	11:27:09 AM	Bypass valve closed
6/27/2012	11:27:09 AM	Bubbler valve closed
6/27/2012	11:27:09 AM	Helium valve opened
6/27/2012	11:27:09 AM	Helium MFC set to  500.000000
6/27/2012	11:27:09 AM	H2 MFC set to  0.000000
6/27/2012	11:27:09 AM	BCl3 MFC set to  0.000000
6/27/2012	11:27:09 AM	PH3 MFC set to  0.000000
6/27/2012	11:27:09 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:27:09 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:27:09 AM	Tube furnace set to 0
6/27/2012	11:28:19 AM	Helium valve closed
6/27/2012	11:28:19 AM	H2 valve closed
6/27/2012	11:28:19 AM	BCl3 valve closed
6/27/2012	11:28:19 AM	PH3 valve closed
6/27/2012	11:28:19 AM	SiCl4 pre valve closed
6/27/2012	11:28:19 AM	SiCl4 post valve closed
6/27/2012	11:28:19 AM	Main Vac valve closed
6/27/2012	11:28:19 AM	Bypass valve closed
6/27/2012	11:28:19 AM	Bubbler valve closed
6/27/2012	11:28:19 AM	Helium MFC set to  0.000000
6/27/2012	11:28:19 AM	H2 MFC set to  0.000000
6/27/2012	11:28:19 AM	BCl3 MFC set to  0.000000
6/27/2012	11:28:19 AM	PH3 MFC set to  0.000000
6/27/2012	11:28:19 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:28:19 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:28:19 AM	Tube furnace set to 0
6/27/2012	11:28:20 AM	Run finished at 11:28 AM
6/27/2012	11:28:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	11:39:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	11:39:54 AM	Recipe started at 11:39 AM
6/27/2012	11:39:54 AM	Helium valve closed
6/27/2012	11:39:54 AM	H2 valve closed
6/27/2012	11:39:54 AM	BCl3 valve closed
6/27/2012	11:39:54 AM	PH3 valve closed
6/27/2012	11:39:54 AM	SiCl4 pre valve closed
6/27/2012	11:39:54 AM	SiCl4 post valve closed
6/27/2012	11:39:54 AM	Main Vac valve closed
6/27/2012	11:39:54 AM	Bubbler valve closed
6/27/2012	11:39:54 AM	Bypass valve opened
6/27/2012	11:39:54 AM	Helium MFC set to  0.000000
6/27/2012	11:39:54 AM	H2 MFC set to  0.000000
6/27/2012	11:39:54 AM	BCl3 MFC set to  0.000000
6/27/2012	11:39:54 AM	PH3 MFC set to  0.000000
6/27/2012	11:39:54 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:39:54 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:39:54 AM	Tube furnace set to 0
6/27/2012	11:41:08 AM	Helium valve closed
6/27/2012	11:41:08 AM	H2 valve closed
6/27/2012	11:41:08 AM	BCl3 valve closed
6/27/2012	11:41:08 AM	PH3 valve closed
6/27/2012	11:41:08 AM	SiCl4 pre valve closed
6/27/2012	11:41:08 AM	SiCl4 post valve closed
6/27/2012	11:41:08 AM	Main Vac valve closed
6/27/2012	11:41:08 AM	Bubbler valve closed
6/27/2012	11:41:08 AM	Bypass valve opened
6/27/2012	11:41:08 AM	Helium MFC set to  0.000000
6/27/2012	11:41:08 AM	H2 MFC set to  0.000000
6/27/2012	11:41:08 AM	BCl3 MFC set to  0.000000
6/27/2012	11:41:08 AM	PH3 MFC set to  0.000000
6/27/2012	11:41:08 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:41:08 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:41:08 AM	Tube furnace set to 0
6/27/2012	11:42:08 AM	Helium valve closed
6/27/2012	11:42:08 AM	H2 valve closed
6/27/2012	11:42:08 AM	BCl3 valve closed
6/27/2012	11:42:08 AM	PH3 valve closed
6/27/2012	11:42:08 AM	SiCl4 pre valve closed
6/27/2012	11:42:08 AM	SiCl4 post valve closed
6/27/2012	11:42:08 AM	Bypass valve closed
6/27/2012	11:42:08 AM	Bubbler valve closed
6/27/2012	11:42:08 AM	Main Vac valve opened
6/27/2012	11:42:08 AM	Helium MFC set to  0.000000
6/27/2012	11:42:08 AM	H2 MFC set to  0.000000
6/27/2012	11:42:08 AM	BCl3 MFC set to  0.000000
6/27/2012	11:42:08 AM	PH3 MFC set to  0.000000
6/27/2012	11:42:08 AM	SiCl4 MFC set to  0.000000
6/27/2012	11:42:08 AM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:42:08 AM	Tube furnace set to 0
6/27/2012	11:42:09 AM	Run finished at 11:42 AM
6/27/2012	11:42:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	12:03:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	12:03:58 PM	Recipe started at 12:03 PM
6/27/2012	12:03:58 PM	Helium valve closed
6/27/2012	12:03:58 PM	H2 valve closed
6/27/2012	12:03:58 PM	BCl3 valve closed
6/27/2012	12:03:58 PM	PH3 valve closed
6/27/2012	12:03:58 PM	SiCl4 pre valve closed
6/27/2012	12:03:58 PM	SiCl4 post valve closed
6/27/2012	12:03:58 PM	Main Vac valve closed
6/27/2012	12:03:58 PM	Bypass valve closed
6/27/2012	12:03:58 PM	Bubbler valve closed
6/27/2012	12:03:58 PM	Helium MFC set to  0.000000
6/27/2012	12:03:58 PM	H2 MFC set to  0.000000
6/27/2012	12:03:58 PM	BCl3 MFC set to  0.000000
6/27/2012	12:03:58 PM	PH3 MFC set to  0.000000
6/27/2012	12:03:58 PM	SiCl4 MFC set to  0.000000
6/27/2012	12:03:58 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	12:03:58 PM	Tube furnace set to 0
6/27/2012	12:04:01 PM	H2 valve closed
6/27/2012	12:04:01 PM	BCl3 valve closed
6/27/2012	12:04:01 PM	PH3 valve closed
6/27/2012	12:04:01 PM	SiCl4 pre valve closed
6/27/2012	12:04:01 PM	SiCl4 post valve closed
6/27/2012	12:04:01 PM	Main Vac valve closed
6/27/2012	12:04:01 PM	Bypass valve closed
6/27/2012	12:04:01 PM	Bubbler valve closed
6/27/2012	12:04:01 PM	Helium valve opened
6/27/2012	12:04:01 PM	Helium MFC set to  500.000000
6/27/2012	12:04:01 PM	H2 MFC set to  0.000000
6/27/2012	12:04:01 PM	BCl3 MFC set to  0.000000
6/27/2012	12:04:01 PM	PH3 MFC set to  0.000000
6/27/2012	12:04:01 PM	SiCl4 MFC set to  0.000000
6/27/2012	12:04:01 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	12:04:01 PM	Tube furnace set to 0
6/27/2012	12:05:11 PM	Helium valve closed
6/27/2012	12:05:11 PM	H2 valve closed
6/27/2012	12:05:11 PM	BCl3 valve closed
6/27/2012	12:05:11 PM	PH3 valve closed
6/27/2012	12:05:11 PM	SiCl4 pre valve closed
6/27/2012	12:05:11 PM	SiCl4 post valve closed
6/27/2012	12:05:11 PM	Main Vac valve closed
6/27/2012	12:05:11 PM	Bypass valve closed
6/27/2012	12:05:11 PM	Bubbler valve closed
6/27/2012	12:05:11 PM	Helium MFC set to  0.000000
6/27/2012	12:05:11 PM	H2 MFC set to  0.000000
6/27/2012	12:05:11 PM	BCl3 MFC set to  0.000000
6/27/2012	12:05:11 PM	PH3 MFC set to  0.000000
6/27/2012	12:05:11 PM	SiCl4 MFC set to  0.000000
6/27/2012	12:05:11 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	12:05:12 PM	Tube furnace set to 0
6/27/2012	12:05:13 PM	Run finished at 12:05 PM
6/27/2012	12:05:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	12:07:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	12:07:56 PM	Recipe started at 12:07 PM
6/27/2012	12:07:56 PM	Helium valve closed
6/27/2012	12:07:56 PM	H2 valve closed
6/27/2012	12:07:56 PM	BCl3 valve closed
6/27/2012	12:07:56 PM	PH3 valve closed
6/27/2012	12:07:56 PM	SiCl4 pre valve closed
6/27/2012	12:07:56 PM	SiCl4 post valve closed
6/27/2012	12:07:56 PM	Main Vac valve closed
6/27/2012	12:07:56 PM	Bubbler valve closed
6/27/2012	12:07:56 PM	Bypass valve opened
6/27/2012	12:07:56 PM	Helium MFC set to  0.000000
6/27/2012	12:07:56 PM	H2 MFC set to  0.000000
6/27/2012	12:07:56 PM	BCl3 MFC set to  0.000000
6/27/2012	12:07:56 PM	PH3 MFC set to  0.000000
6/27/2012	12:07:56 PM	SiCl4 MFC set to  0.000000
6/27/2012	12:07:56 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	12:07:56 PM	Tube furnace set to 0
6/27/2012	12:09:01 PM	Helium valve closed
6/27/2012	12:09:01 PM	H2 valve closed
6/27/2012	12:09:02 PM	BCl3 valve closed
6/27/2012	12:09:02 PM	PH3 valve closed
6/27/2012	12:09:02 PM	SiCl4 pre valve closed
6/27/2012	12:09:02 PM	SiCl4 post valve closed
6/27/2012	12:09:02 PM	Main Vac valve closed
6/27/2012	12:09:02 PM	Bubbler valve closed
6/27/2012	12:09:02 PM	Bypass valve opened
6/27/2012	12:09:02 PM	Helium MFC set to  0.000000
6/27/2012	12:09:02 PM	H2 MFC set to  0.000000
6/27/2012	12:09:02 PM	BCl3 MFC set to  0.000000
6/27/2012	12:09:02 PM	PH3 MFC set to  0.000000
6/27/2012	12:09:02 PM	SiCl4 MFC set to  0.000000
6/27/2012	12:09:02 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	12:09:02 PM	Tube furnace set to 0
6/27/2012	12:10:02 PM	Helium valve closed
6/27/2012	12:10:02 PM	H2 valve closed
6/27/2012	12:10:02 PM	BCl3 valve closed
6/27/2012	12:10:02 PM	PH3 valve closed
6/27/2012	12:10:02 PM	SiCl4 pre valve closed
6/27/2012	12:10:02 PM	SiCl4 post valve closed
6/27/2012	12:10:02 PM	Bypass valve closed
6/27/2012	12:10:02 PM	Bubbler valve closed
6/27/2012	12:10:02 PM	Main Vac valve opened
6/27/2012	12:10:02 PM	Helium MFC set to  0.000000
6/27/2012	12:10:02 PM	H2 MFC set to  0.000000
6/27/2012	12:10:02 PM	BCl3 MFC set to  0.000000
6/27/2012	12:10:02 PM	PH3 MFC set to  0.000000
6/27/2012	12:10:02 PM	SiCl4 MFC set to  0.000000
6/27/2012	12:10:02 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	12:10:02 PM	Tube furnace set to 0
6/27/2012	12:10:03 PM	Run finished at 12:10 PM
6/27/2012	12:10:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	1:56:02 PM	Main Vac valve closed
6/27/2012	1:56:15 PM	Main Vac valve opened
6/27/2012	1:57:58 PM	Recipe started at 1:57 PM
6/27/2012	1:57:58 PM	Helium valve closed
6/27/2012	1:57:58 PM	H2 valve closed
6/27/2012	1:57:58 PM	BCl3 valve closed
6/27/2012	1:57:58 PM	PH3 valve closed
6/27/2012	1:57:58 PM	SiCl4 pre valve closed
6/27/2012	1:57:58 PM	SiCl4 post valve closed
6/27/2012	1:57:58 PM	Bypass valve closed
6/27/2012	1:57:58 PM	Bubbler valve closed
6/27/2012	1:57:58 PM	Main Vac valve opened
6/27/2012	1:57:58 PM	Helium MFC set to  0.000000
6/27/2012	1:57:58 PM	H2 MFC set to  0.000000
6/27/2012	1:57:58 PM	BCl3 MFC set to  0.000000
6/27/2012	1:57:58 PM	PH3 MFC set to  0.000000
6/27/2012	1:57:58 PM	SiCl4 MFC set to  0.000000
6/27/2012	1:57:58 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	1:57:58 PM	Tube furnace set to 0
6/27/2012	1:58:01 PM	Helium valve closed
6/27/2012	1:58:01 PM	H2 valve closed
6/27/2012	1:58:01 PM	BCl3 valve closed
6/27/2012	1:58:01 PM	PH3 valve closed
6/27/2012	1:58:01 PM	SiCl4 pre valve closed
6/27/2012	1:58:01 PM	SiCl4 post valve closed
6/27/2012	1:58:01 PM	Main Vac valve closed
6/27/2012	1:58:01 PM	Bypass valve closed
6/27/2012	1:58:01 PM	Bubbler valve closed
6/27/2012	1:58:01 PM	Helium MFC set to  0.000000
6/27/2012	1:58:01 PM	H2 MFC set to  0.000000
6/27/2012	1:58:01 PM	BCl3 MFC set to  0.000000
6/27/2012	1:58:01 PM	PH3 MFC set to  0.000000
6/27/2012	1:58:01 PM	SiCl4 MFC set to  0.000000
6/27/2012	1:58:01 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	1:58:01 PM	Tube furnace set to 0
6/27/2012	1:58:04 PM	Helium valve closed
6/27/2012	1:58:04 PM	BCl3 valve closed
6/27/2012	1:58:04 PM	PH3 valve closed
6/27/2012	1:58:04 PM	SiCl4 pre valve closed
6/27/2012	1:58:04 PM	SiCl4 post valve closed
6/27/2012	1:58:04 PM	Main Vac valve closed
6/27/2012	1:58:04 PM	Bypass valve closed
6/27/2012	1:58:04 PM	Bubbler valve closed
6/27/2012	1:58:04 PM	H2 valve opened
6/27/2012	1:58:04 PM	Helium MFC set to  0.000000
6/27/2012	1:58:04 PM	H2 MFC set to  500.000000
6/27/2012	1:58:04 PM	BCl3 MFC set to  0.000000
6/27/2012	1:58:04 PM	PH3 MFC set to  0.000000
6/27/2012	1:58:04 PM	SiCl4 MFC set to  0.000000
6/27/2012	1:58:04 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	1:58:05 PM	Tube furnace set to 0
6/27/2012	1:59:20 PM	Helium valve closed
6/27/2012	1:59:20 PM	BCl3 valve closed
6/27/2012	1:59:20 PM	PH3 valve closed
6/27/2012	1:59:20 PM	SiCl4 pre valve closed
6/27/2012	1:59:20 PM	SiCl4 post valve closed
6/27/2012	1:59:20 PM	Main Vac valve closed
6/27/2012	1:59:20 PM	Bypass valve closed
6/27/2012	1:59:20 PM	H2 valve opened
6/27/2012	1:59:20 PM	Bubbler valve opened
6/27/2012	1:59:20 PM	Helium MFC set to  0.000000
6/27/2012	1:59:20 PM	H2 MFC set to  500.000000
6/27/2012	1:59:20 PM	BCl3 MFC set to  0.000000
6/27/2012	1:59:20 PM	PH3 MFC set to  0.000000
6/27/2012	1:59:20 PM	SiCl4 MFC set to  0.000000
6/27/2012	1:59:20 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	1:59:20 PM	Tube furnace set to 0
6/27/2012	1:59:21 PM	Helium valve closed
6/27/2012	1:59:21 PM	BCl3 valve closed
6/27/2012	1:59:21 PM	PH3 valve closed
6/27/2012	1:59:21 PM	SiCl4 pre valve closed
6/27/2012	1:59:21 PM	SiCl4 post valve closed
6/27/2012	1:59:21 PM	Main Vac valve closed
6/27/2012	1:59:21 PM	Bypass valve closed
6/27/2012	1:59:21 PM	H2 valve opened
6/27/2012	1:59:21 PM	Bubbler valve opened
6/27/2012	1:59:21 PM	Helium MFC set to  0.000000
6/27/2012	1:59:21 PM	H2 MFC set to  500.000000
6/27/2012	1:59:21 PM	BCl3 MFC set to  0.000000
6/27/2012	1:59:21 PM	PH3 MFC set to  0.000000
6/27/2012	1:59:21 PM	SiCl4 MFC set to  0.000000
6/27/2012	1:59:21 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	1:59:21 PM	Tube furnace set to 1000
6/27/2012	2:24:21 PM	Helium valve closed
6/27/2012	2:24:21 PM	PH3 valve closed
6/27/2012	2:24:21 PM	Main Vac valve closed
6/27/2012	2:24:21 PM	Bypass valve closed
6/27/2012	2:24:21 PM	H2 valve opened
6/27/2012	2:24:21 PM	BCl3 valve opened
6/27/2012	2:24:21 PM	SiCl4 pre valve opened
6/27/2012	2:24:21 PM	SiCl4 post valve opened
6/27/2012	2:24:21 PM	Bubbler valve opened
6/27/2012	2:24:21 PM	Helium MFC set to  0.000000
6/27/2012	2:24:21 PM	H2 MFC set to  450.000000
6/27/2012	2:24:21 PM	BCl3 MFC set to  1.000000
6/27/2012	2:24:21 PM	PH3 MFC set to  0.000000
6/27/2012	2:24:21 PM	SiCl4 MFC set to  50.000000
6/27/2012	2:24:21 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	2:24:21 PM	Tube furnace set to 1000
6/27/2012	2:58:21 PM	Helium valve closed
6/27/2012	2:58:21 PM	BCl3 valve closed
6/27/2012	2:58:21 PM	PH3 valve closed
6/27/2012	2:58:21 PM	SiCl4 pre valve closed
6/27/2012	2:58:21 PM	SiCl4 post valve closed
6/27/2012	2:58:21 PM	Main Vac valve closed
6/27/2012	2:58:21 PM	Bypass valve closed
6/27/2012	2:58:21 PM	H2 valve opened
6/27/2012	2:58:21 PM	Bubbler valve opened
6/27/2012	2:58:21 PM	Helium MFC set to  0.000000
6/27/2012	2:58:21 PM	H2 MFC set to  500.000000
6/27/2012	2:58:21 PM	BCl3 MFC set to  0.000000
6/27/2012	2:58:21 PM	PH3 MFC set to  0.000000
6/27/2012	2:58:21 PM	SiCl4 MFC set to  0.000000
6/27/2012	2:58:21 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	2:58:21 PM	Tube furnace set to 750
6/27/2012	3:13:21 PM	H2 valve closed
6/27/2012	3:13:21 PM	BCl3 valve closed
6/27/2012	3:13:21 PM	PH3 valve closed
6/27/2012	3:13:21 PM	SiCl4 pre valve closed
6/27/2012	3:13:21 PM	SiCl4 post valve closed
6/27/2012	3:13:21 PM	Main Vac valve closed
6/27/2012	3:13:21 PM	Bypass valve closed
6/27/2012	3:13:21 PM	Helium valve opened
6/27/2012	3:13:21 PM	Bubbler valve opened
6/27/2012	3:13:21 PM	Helium MFC set to  500.000000
6/27/2012	3:13:21 PM	H2 MFC set to  0.000000
6/27/2012	3:13:21 PM	BCl3 MFC set to  0.000000
6/27/2012	3:13:22 PM	PH3 MFC set to  0.000000
6/27/2012	3:13:22 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:13:22 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:13:22 PM	Tube furnace set to 0
6/27/2012	3:33:22 PM	Helium valve closed
6/27/2012	3:33:22 PM	H2 valve closed
6/27/2012	3:33:22 PM	BCl3 valve closed
6/27/2012	3:33:22 PM	PH3 valve closed
6/27/2012	3:33:22 PM	SiCl4 pre valve closed
6/27/2012	3:33:22 PM	SiCl4 post valve closed
6/27/2012	3:33:22 PM	Main Vac valve closed
6/27/2012	3:33:22 PM	Bypass valve closed
6/27/2012	3:33:22 PM	Bubbler valve closed
6/27/2012	3:33:22 PM	Helium MFC set to  0.000000
6/27/2012	3:33:22 PM	H2 MFC set to  0.000000
6/27/2012	3:33:22 PM	BCl3 MFC set to  0.000000
6/27/2012	3:33:22 PM	PH3 MFC set to  0.000000
6/27/2012	3:33:22 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:33:22 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:33:22 PM	Tube furnace set to 0
6/27/2012	3:51:00 PM	Helium valve closed
6/27/2012	3:51:00 PM	H2 valve closed
6/27/2012	3:51:00 PM	BCl3 valve closed
6/27/2012	3:51:00 PM	PH3 valve closed
6/27/2012	3:51:00 PM	SiCl4 pre valve closed
6/27/2012	3:51:00 PM	SiCl4 post valve closed
6/27/2012	3:51:00 PM	Main Vac valve closed
6/27/2012	3:51:00 PM	Bubbler valve closed
6/27/2012	3:51:00 PM	Bypass valve opened
6/27/2012	3:51:00 PM	Helium MFC set to  0.000000
6/27/2012	3:51:00 PM	H2 MFC set to  0.000000
6/27/2012	3:51:00 PM	BCl3 MFC set to  0.000000
6/27/2012	3:51:00 PM	PH3 MFC set to  0.000000
6/27/2012	3:51:00 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:51:00 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:51:00 PM	Tube furnace set to 0
6/27/2012	3:51:57 PM	Helium valve closed
6/27/2012	3:51:57 PM	H2 valve closed
6/27/2012	3:51:57 PM	BCl3 valve closed
6/27/2012	3:51:57 PM	PH3 valve closed
6/27/2012	3:51:57 PM	SiCl4 pre valve closed
6/27/2012	3:51:57 PM	SiCl4 post valve closed
6/27/2012	3:51:57 PM	Main Vac valve closed
6/27/2012	3:51:57 PM	Bubbler valve closed
6/27/2012	3:51:57 PM	Bypass valve opened
6/27/2012	3:51:57 PM	Helium MFC set to  0.000000
6/27/2012	3:51:57 PM	H2 MFC set to  0.000000
6/27/2012	3:51:57 PM	BCl3 MFC set to  0.000000
6/27/2012	3:51:57 PM	PH3 MFC set to  0.000000
6/27/2012	3:51:57 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:51:57 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:51:57 PM	Tube furnace set to 0
6/27/2012	3:52:57 PM	Helium valve closed
6/27/2012	3:52:57 PM	H2 valve closed
6/27/2012	3:52:57 PM	BCl3 valve closed
6/27/2012	3:52:57 PM	PH3 valve closed
6/27/2012	3:52:57 PM	SiCl4 pre valve closed
6/27/2012	3:52:57 PM	SiCl4 post valve closed
6/27/2012	3:52:57 PM	Bypass valve closed
6/27/2012	3:52:57 PM	Bubbler valve closed
6/27/2012	3:52:57 PM	Main Vac valve opened
6/27/2012	3:52:57 PM	Helium MFC set to  0.000000
6/27/2012	3:52:57 PM	H2 MFC set to  0.000000
6/27/2012	3:52:57 PM	BCl3 MFC set to  0.000000
6/27/2012	3:52:57 PM	PH3 MFC set to  0.000000
6/27/2012	3:52:57 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:52:57 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:52:57 PM	Tube furnace set to 0
6/27/2012	3:53:18 PM	Run finished at 3:53 PM
6/27/2012	3:53:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	3:53:25 PM	Recipe started at 3:53 PM
6/27/2012	3:53:25 PM	Helium valve closed
6/27/2012	3:53:25 PM	H2 valve closed
6/27/2012	3:53:25 PM	BCl3 valve closed
6/27/2012	3:53:25 PM	PH3 valve closed
6/27/2012	3:53:25 PM	SiCl4 pre valve closed
6/27/2012	3:53:25 PM	SiCl4 post valve closed
6/27/2012	3:53:25 PM	Main Vac valve closed
6/27/2012	3:53:25 PM	Bypass valve closed
6/27/2012	3:53:25 PM	Bubbler valve closed
6/27/2012	3:53:25 PM	Helium MFC set to  0.000000
6/27/2012	3:53:25 PM	H2 MFC set to  0.000000
6/27/2012	3:53:25 PM	BCl3 MFC set to  0.000000
6/27/2012	3:53:25 PM	PH3 MFC set to  0.000000
6/27/2012	3:53:25 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:53:25 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:53:25 PM	Tube furnace set to 0
6/27/2012	3:53:28 PM	H2 valve closed
6/27/2012	3:53:28 PM	BCl3 valve closed
6/27/2012	3:53:28 PM	PH3 valve closed
6/27/2012	3:53:28 PM	SiCl4 pre valve closed
6/27/2012	3:53:28 PM	SiCl4 post valve closed
6/27/2012	3:53:28 PM	Main Vac valve closed
6/27/2012	3:53:28 PM	Bypass valve closed
6/27/2012	3:53:28 PM	Bubbler valve closed
6/27/2012	3:53:28 PM	Helium valve opened
6/27/2012	3:53:28 PM	Helium MFC set to  500.000000
6/27/2012	3:53:28 PM	H2 MFC set to  0.000000
6/27/2012	3:53:28 PM	BCl3 MFC set to  0.000000
6/27/2012	3:53:28 PM	PH3 MFC set to  0.000000
6/27/2012	3:53:28 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:53:28 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:53:28 PM	Tube furnace set to 0
6/27/2012	3:54:40 PM	Helium valve closed
6/27/2012	3:54:40 PM	H2 valve closed
6/27/2012	3:54:40 PM	BCl3 valve closed
6/27/2012	3:54:40 PM	PH3 valve closed
6/27/2012	3:54:40 PM	SiCl4 pre valve closed
6/27/2012	3:54:40 PM	SiCl4 post valve closed
6/27/2012	3:54:40 PM	Main Vac valve closed
6/27/2012	3:54:40 PM	Bypass valve closed
6/27/2012	3:54:40 PM	Bubbler valve closed
6/27/2012	3:54:40 PM	Helium MFC set to  0.000000
6/27/2012	3:54:40 PM	H2 MFC set to  0.000000
6/27/2012	3:54:40 PM	BCl3 MFC set to  0.000000
6/27/2012	3:54:40 PM	PH3 MFC set to  0.000000
6/27/2012	3:54:40 PM	SiCl4 MFC set to  0.000000
6/27/2012	3:54:40 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	3:54:40 PM	Tube furnace set to 0
6/27/2012	3:54:41 PM	Run finished at 3:54 PM
6/27/2012	3:54:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	4:01:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	4:01:13 PM	Recipe started at 4:01 PM
6/27/2012	4:01:13 PM	Helium valve closed
6/27/2012	4:01:13 PM	H2 valve closed
6/27/2012	4:01:13 PM	BCl3 valve closed
6/27/2012	4:01:13 PM	PH3 valve closed
6/27/2012	4:01:13 PM	SiCl4 pre valve closed
6/27/2012	4:01:13 PM	SiCl4 post valve closed
6/27/2012	4:01:13 PM	Main Vac valve closed
6/27/2012	4:01:13 PM	Bubbler valve closed
6/27/2012	4:01:13 PM	Bypass valve opened
6/27/2012	4:01:13 PM	Helium MFC set to  0.000000
6/27/2012	4:01:13 PM	H2 MFC set to  0.000000
6/27/2012	4:01:13 PM	BCl3 MFC set to  0.000000
6/27/2012	4:01:13 PM	PH3 MFC set to  0.000000
6/27/2012	4:01:13 PM	SiCl4 MFC set to  0.000000
6/27/2012	4:01:13 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	4:01:13 PM	Tube furnace set to 0
6/27/2012	4:02:25 PM	Helium valve closed
6/27/2012	4:02:25 PM	H2 valve closed
6/27/2012	4:02:25 PM	BCl3 valve closed
6/27/2012	4:02:25 PM	PH3 valve closed
6/27/2012	4:02:25 PM	SiCl4 pre valve closed
6/27/2012	4:02:25 PM	SiCl4 post valve closed
6/27/2012	4:02:25 PM	Main Vac valve closed
6/27/2012	4:02:25 PM	Bubbler valve closed
6/27/2012	4:02:25 PM	Bypass valve opened
6/27/2012	4:02:25 PM	Helium MFC set to  0.000000
6/27/2012	4:02:25 PM	H2 MFC set to  0.000000
6/27/2012	4:02:25 PM	BCl3 MFC set to  0.000000
6/27/2012	4:02:25 PM	PH3 MFC set to  0.000000
6/27/2012	4:02:25 PM	SiCl4 MFC set to  0.000000
6/27/2012	4:02:25 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	4:02:25 PM	Tube furnace set to 0
6/27/2012	4:03:25 PM	Helium valve closed
6/27/2012	4:03:25 PM	H2 valve closed
6/27/2012	4:03:25 PM	BCl3 valve closed
6/27/2012	4:03:25 PM	PH3 valve closed
6/27/2012	4:03:25 PM	SiCl4 pre valve closed
6/27/2012	4:03:25 PM	SiCl4 post valve closed
6/27/2012	4:03:25 PM	Bypass valve closed
6/27/2012	4:03:25 PM	Bubbler valve closed
6/27/2012	4:03:25 PM	Main Vac valve opened
6/27/2012	4:03:25 PM	Helium MFC set to  0.000000
6/27/2012	4:03:25 PM	H2 MFC set to  0.000000
6/27/2012	4:03:25 PM	BCl3 MFC set to  0.000000
6/27/2012	4:03:25 PM	PH3 MFC set to  0.000000
6/27/2012	4:03:25 PM	SiCl4 MFC set to  0.000000
6/27/2012	4:03:25 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	4:03:25 PM	Tube furnace set to 0
6/27/2012	4:03:26 PM	Run finished at 4:03 PM
6/27/2012	4:03:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	4:51:02 PM	Main Vac valve closed
6/27/2012	4:51:14 PM	Main Vac valve opened
6/27/2012	4:53:44 PM	Recipe started at 4:53 PM
6/27/2012	4:53:44 PM	Helium valve closed
6/27/2012	4:53:44 PM	H2 valve closed
6/27/2012	4:53:44 PM	BCl3 valve closed
6/27/2012	4:53:44 PM	PH3 valve closed
6/27/2012	4:53:44 PM	SiCl4 pre valve closed
6/27/2012	4:53:44 PM	SiCl4 post valve closed
6/27/2012	4:53:44 PM	Bypass valve closed
6/27/2012	4:53:44 PM	Bubbler valve closed
6/27/2012	4:53:44 PM	Main Vac valve opened
6/27/2012	4:53:44 PM	Helium MFC set to  0.000000
6/27/2012	4:53:44 PM	H2 MFC set to  0.000000
6/27/2012	4:53:44 PM	BCl3 MFC set to  0.000000
6/27/2012	4:53:44 PM	PH3 MFC set to  0.000000
6/27/2012	4:53:44 PM	SiCl4 MFC set to  0.000000
6/27/2012	4:53:44 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	4:53:44 PM	Tube furnace set to 0
6/27/2012	5:26:45 PM	Helium valve closed
6/27/2012	5:26:45 PM	H2 valve closed
6/27/2012	5:26:45 PM	BCl3 valve closed
6/27/2012	5:26:45 PM	PH3 valve closed
6/27/2012	5:26:45 PM	SiCl4 pre valve closed
6/27/2012	5:26:45 PM	SiCl4 post valve closed
6/27/2012	5:26:45 PM	Main Vac valve closed
6/27/2012	5:26:45 PM	Bypass valve closed
6/27/2012	5:26:45 PM	Bubbler valve closed
6/27/2012	5:26:45 PM	Helium MFC set to  0.000000
6/27/2012	5:26:45 PM	H2 MFC set to  0.000000
6/27/2012	5:26:45 PM	BCl3 MFC set to  0.000000
6/27/2012	5:26:45 PM	PH3 MFC set to  0.000000
6/27/2012	5:26:45 PM	SiCl4 MFC set to  0.000000
6/27/2012	5:26:45 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	5:26:45 PM	Tube furnace set to 0
6/27/2012	5:26:48 PM	Helium valve closed
6/27/2012	5:26:48 PM	BCl3 valve closed
6/27/2012	5:26:48 PM	PH3 valve closed
6/27/2012	5:26:48 PM	SiCl4 pre valve closed
6/27/2012	5:26:48 PM	SiCl4 post valve closed
6/27/2012	5:26:48 PM	Main Vac valve closed
6/27/2012	5:26:48 PM	Bypass valve closed
6/27/2012	5:26:48 PM	Bubbler valve closed
6/27/2012	5:26:48 PM	H2 valve opened
6/27/2012	5:26:48 PM	Helium MFC set to  0.000000
6/27/2012	5:26:48 PM	H2 MFC set to  500.000000
6/27/2012	5:26:48 PM	BCl3 MFC set to  0.000000
6/27/2012	5:26:48 PM	PH3 MFC set to  0.000000
6/27/2012	5:26:48 PM	SiCl4 MFC set to  0.000000
6/27/2012	5:26:48 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	5:26:48 PM	Tube furnace set to 0
6/27/2012	5:28:02 PM	Helium valve closed
6/27/2012	5:28:02 PM	BCl3 valve closed
6/27/2012	5:28:02 PM	PH3 valve closed
6/27/2012	5:28:02 PM	SiCl4 pre valve closed
6/27/2012	5:28:02 PM	SiCl4 post valve closed
6/27/2012	5:28:02 PM	Main Vac valve closed
6/27/2012	5:28:02 PM	Bypass valve closed
6/27/2012	5:28:02 PM	H2 valve opened
6/27/2012	5:28:02 PM	Bubbler valve opened
6/27/2012	5:28:02 PM	Helium MFC set to  0.000000
6/27/2012	5:28:02 PM	H2 MFC set to  500.000000
6/27/2012	5:28:02 PM	BCl3 MFC set to  0.000000
6/27/2012	5:28:02 PM	PH3 MFC set to  0.000000
6/27/2012	5:28:02 PM	SiCl4 MFC set to  0.000000
6/27/2012	5:28:02 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	5:28:02 PM	Tube furnace set to 0
6/27/2012	5:28:03 PM	Helium valve closed
6/27/2012	5:28:03 PM	BCl3 valve closed
6/27/2012	5:28:03 PM	PH3 valve closed
6/27/2012	5:28:03 PM	SiCl4 pre valve closed
6/27/2012	5:28:03 PM	SiCl4 post valve closed
6/27/2012	5:28:03 PM	Main Vac valve closed
6/27/2012	5:28:04 PM	Bypass valve closed
6/27/2012	5:28:04 PM	H2 valve opened
6/27/2012	5:28:04 PM	Bubbler valve opened
6/27/2012	5:28:04 PM	Helium MFC set to  0.000000
6/27/2012	5:28:04 PM	H2 MFC set to  500.000000
6/27/2012	5:28:04 PM	BCl3 MFC set to  0.000000
6/27/2012	5:28:04 PM	PH3 MFC set to  0.000000
6/27/2012	5:28:04 PM	SiCl4 MFC set to  0.000000
6/27/2012	5:28:04 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	5:28:04 PM	Tube furnace set to 1000
6/27/2012	5:53:04 PM	Helium valve closed
6/27/2012	5:53:04 PM	PH3 valve closed
6/27/2012	5:53:04 PM	Main Vac valve closed
6/27/2012	5:53:04 PM	Bypass valve closed
6/27/2012	5:53:04 PM	H2 valve opened
6/27/2012	5:53:04 PM	BCl3 valve opened
6/27/2012	5:53:04 PM	SiCl4 pre valve opened
6/27/2012	5:53:04 PM	SiCl4 post valve opened
6/27/2012	5:53:04 PM	Bubbler valve opened
6/27/2012	5:53:04 PM	Helium MFC set to  0.000000
6/27/2012	5:53:04 PM	H2 MFC set to  450.000000
6/27/2012	5:53:04 PM	BCl3 MFC set to  1.000000
6/27/2012	5:53:04 PM	PH3 MFC set to  0.000000
6/27/2012	5:53:04 PM	SiCl4 MFC set to  50.000000
6/27/2012	5:53:04 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	5:53:04 PM	Tube furnace set to 1000
6/27/2012	6:27:04 PM	Helium valve closed
6/27/2012	6:27:04 PM	BCl3 valve closed
6/27/2012	6:27:04 PM	PH3 valve closed
6/27/2012	6:27:04 PM	SiCl4 pre valve closed
6/27/2012	6:27:04 PM	SiCl4 post valve closed
6/27/2012	6:27:04 PM	Main Vac valve closed
6/27/2012	6:27:04 PM	Bypass valve closed
6/27/2012	6:27:04 PM	H2 valve opened
6/27/2012	6:27:04 PM	Bubbler valve opened
6/27/2012	6:27:04 PM	Helium MFC set to  0.000000
6/27/2012	6:27:04 PM	H2 MFC set to  500.000000
6/27/2012	6:27:04 PM	BCl3 MFC set to  0.000000
6/27/2012	6:27:04 PM	PH3 MFC set to  0.000000
6/27/2012	6:27:04 PM	SiCl4 MFC set to  0.000000
6/27/2012	6:27:04 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	6:27:04 PM	Tube furnace set to 750
6/27/2012	6:42:04 PM	H2 valve closed
6/27/2012	6:42:04 PM	BCl3 valve closed
6/27/2012	6:42:04 PM	PH3 valve closed
6/27/2012	6:42:04 PM	SiCl4 pre valve closed
6/27/2012	6:42:04 PM	SiCl4 post valve closed
6/27/2012	6:42:04 PM	Main Vac valve closed
6/27/2012	6:42:04 PM	Bypass valve closed
6/27/2012	6:42:04 PM	Helium valve opened
6/27/2012	6:42:04 PM	Bubbler valve opened
6/27/2012	6:42:04 PM	Helium MFC set to  500.000000
6/27/2012	6:42:04 PM	H2 MFC set to  0.000000
6/27/2012	6:42:04 PM	BCl3 MFC set to  0.000000
6/27/2012	6:42:04 PM	PH3 MFC set to  0.000000
6/27/2012	6:42:04 PM	SiCl4 MFC set to  0.000000
6/27/2012	6:42:04 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	6:42:04 PM	Tube furnace set to 0
6/27/2012	7:02:01 PM	Helium valve closed
6/27/2012	7:02:01 PM	H2 valve closed
6/27/2012	7:02:01 PM	BCl3 valve closed
6/27/2012	7:02:01 PM	PH3 valve closed
6/27/2012	7:02:01 PM	SiCl4 pre valve closed
6/27/2012	7:02:01 PM	SiCl4 post valve closed
6/27/2012	7:02:01 PM	Main Vac valve closed
6/27/2012	7:02:01 PM	Bypass valve closed
6/27/2012	7:02:01 PM	Bubbler valve closed
6/27/2012	7:02:01 PM	Helium MFC set to  0.000000
6/27/2012	7:02:01 PM	H2 MFC set to  0.000000
6/27/2012	7:02:01 PM	BCl3 MFC set to  0.000000
6/27/2012	7:02:01 PM	PH3 MFC set to  0.000000
6/27/2012	7:02:01 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:02:01 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:02:01 PM	Tube furnace set to 0
6/27/2012	7:02:10 PM	Helium valve closed
6/27/2012	7:02:10 PM	H2 valve closed
6/27/2012	7:02:10 PM	BCl3 valve closed
6/27/2012	7:02:10 PM	PH3 valve closed
6/27/2012	7:02:10 PM	SiCl4 pre valve closed
6/27/2012	7:02:10 PM	SiCl4 post valve closed
6/27/2012	7:02:10 PM	Main Vac valve closed
6/27/2012	7:02:10 PM	Bubbler valve closed
6/27/2012	7:02:10 PM	Bypass valve opened
6/27/2012	7:02:10 PM	Helium MFC set to  0.000000
6/27/2012	7:02:10 PM	H2 MFC set to  0.000000
6/27/2012	7:02:10 PM	BCl3 MFC set to  0.000000
6/27/2012	7:02:10 PM	PH3 MFC set to  0.000000
6/27/2012	7:02:10 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:02:10 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:02:10 PM	Tube furnace set to 0
6/27/2012	7:03:04 PM	Helium valve closed
6/27/2012	7:03:04 PM	H2 valve closed
6/27/2012	7:03:04 PM	BCl3 valve closed
6/27/2012	7:03:04 PM	PH3 valve closed
6/27/2012	7:03:04 PM	SiCl4 pre valve closed
6/27/2012	7:03:04 PM	SiCl4 post valve closed
6/27/2012	7:03:04 PM	Main Vac valve closed
6/27/2012	7:03:04 PM	Bubbler valve closed
6/27/2012	7:03:04 PM	Bypass valve opened
6/27/2012	7:03:04 PM	Helium MFC set to  0.000000
6/27/2012	7:03:04 PM	H2 MFC set to  0.000000
6/27/2012	7:03:04 PM	BCl3 MFC set to  0.000000
6/27/2012	7:03:04 PM	PH3 MFC set to  0.000000
6/27/2012	7:03:04 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:03:04 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:03:04 PM	Tube furnace set to 0
6/27/2012	7:04:04 PM	Helium valve closed
6/27/2012	7:04:04 PM	H2 valve closed
6/27/2012	7:04:04 PM	BCl3 valve closed
6/27/2012	7:04:04 PM	PH3 valve closed
6/27/2012	7:04:04 PM	SiCl4 pre valve closed
6/27/2012	7:04:04 PM	SiCl4 post valve closed
6/27/2012	7:04:04 PM	Bypass valve closed
6/27/2012	7:04:04 PM	Bubbler valve closed
6/27/2012	7:04:05 PM	Main Vac valve opened
6/27/2012	7:04:05 PM	Helium MFC set to  0.000000
6/27/2012	7:04:05 PM	H2 MFC set to  0.000000
6/27/2012	7:04:05 PM	BCl3 MFC set to  0.000000
6/27/2012	7:04:05 PM	PH3 MFC set to  0.000000
6/27/2012	7:04:05 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:04:05 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:04:05 PM	Tube furnace set to 0
6/27/2012	7:06:31 PM	Run finished at 7:06 PM
6/27/2012	7:06:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	7:06:39 PM	Recipe started at 7:06 PM
6/27/2012	7:06:39 PM	Helium valve closed
6/27/2012	7:06:39 PM	H2 valve closed
6/27/2012	7:06:39 PM	BCl3 valve closed
6/27/2012	7:06:39 PM	PH3 valve closed
6/27/2012	7:06:39 PM	SiCl4 pre valve closed
6/27/2012	7:06:39 PM	SiCl4 post valve closed
6/27/2012	7:06:39 PM	Main Vac valve closed
6/27/2012	7:06:39 PM	Bypass valve closed
6/27/2012	7:06:39 PM	Bubbler valve closed
6/27/2012	7:06:39 PM	Helium MFC set to  0.000000
6/27/2012	7:06:39 PM	H2 MFC set to  0.000000
6/27/2012	7:06:39 PM	BCl3 MFC set to  0.000000
6/27/2012	7:06:40 PM	PH3 MFC set to  0.000000
6/27/2012	7:06:40 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:06:40 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:06:40 PM	Tube furnace set to 0
6/27/2012	7:06:43 PM	H2 valve closed
6/27/2012	7:06:43 PM	BCl3 valve closed
6/27/2012	7:06:43 PM	PH3 valve closed
6/27/2012	7:06:43 PM	SiCl4 pre valve closed
6/27/2012	7:06:43 PM	SiCl4 post valve closed
6/27/2012	7:06:43 PM	Main Vac valve closed
6/27/2012	7:06:43 PM	Bypass valve closed
6/27/2012	7:06:43 PM	Bubbler valve closed
6/27/2012	7:06:43 PM	Helium valve opened
6/27/2012	7:06:43 PM	Helium MFC set to  500.000000
6/27/2012	7:06:43 PM	H2 MFC set to  0.000000
6/27/2012	7:06:43 PM	BCl3 MFC set to  0.000000
6/27/2012	7:06:43 PM	PH3 MFC set to  0.000000
6/27/2012	7:06:43 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:06:43 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:06:43 PM	Tube furnace set to 0
6/27/2012	7:07:52 PM	Helium valve closed
6/27/2012	7:07:52 PM	H2 valve closed
6/27/2012	7:07:52 PM	BCl3 valve closed
6/27/2012	7:07:52 PM	PH3 valve closed
6/27/2012	7:07:52 PM	SiCl4 pre valve closed
6/27/2012	7:07:52 PM	SiCl4 post valve closed
6/27/2012	7:07:52 PM	Main Vac valve closed
6/27/2012	7:07:52 PM	Bypass valve closed
6/27/2012	7:07:52 PM	Bubbler valve closed
6/27/2012	7:07:52 PM	Helium MFC set to  0.000000
6/27/2012	7:07:52 PM	H2 MFC set to  0.000000
6/27/2012	7:07:52 PM	BCl3 MFC set to  0.000000
6/27/2012	7:07:52 PM	PH3 MFC set to  0.000000
6/27/2012	7:07:52 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:07:52 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:07:53 PM	Tube furnace set to 0
6/27/2012	7:07:54 PM	Run finished at 7:07 PM
6/27/2012	7:07:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	7:14:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	7:14:23 PM	Recipe started at 7:14 PM
6/27/2012	7:14:23 PM	Helium valve closed
6/27/2012	7:14:23 PM	H2 valve closed
6/27/2012	7:14:23 PM	BCl3 valve closed
6/27/2012	7:14:23 PM	PH3 valve closed
6/27/2012	7:14:23 PM	SiCl4 pre valve closed
6/27/2012	7:14:23 PM	SiCl4 post valve closed
6/27/2012	7:14:23 PM	Main Vac valve closed
6/27/2012	7:14:23 PM	Bubbler valve closed
6/27/2012	7:14:23 PM	Bypass valve opened
6/27/2012	7:14:23 PM	Helium MFC set to  0.000000
6/27/2012	7:14:23 PM	H2 MFC set to  0.000000
6/27/2012	7:14:23 PM	BCl3 MFC set to  0.000000
6/27/2012	7:14:23 PM	PH3 MFC set to  0.000000
6/27/2012	7:14:23 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:14:23 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:14:23 PM	Tube furnace set to 0
6/27/2012	7:15:31 PM	Helium valve closed
6/27/2012	7:15:31 PM	H2 valve closed
6/27/2012	7:15:31 PM	BCl3 valve closed
6/27/2012	7:15:31 PM	PH3 valve closed
6/27/2012	7:15:31 PM	SiCl4 pre valve closed
6/27/2012	7:15:31 PM	SiCl4 post valve closed
6/27/2012	7:15:31 PM	Main Vac valve closed
6/27/2012	7:15:31 PM	Bubbler valve closed
6/27/2012	7:15:31 PM	Bypass valve opened
6/27/2012	7:15:31 PM	Helium MFC set to  0.000000
6/27/2012	7:15:31 PM	H2 MFC set to  0.000000
6/27/2012	7:15:31 PM	BCl3 MFC set to  0.000000
6/27/2012	7:15:31 PM	PH3 MFC set to  0.000000
6/27/2012	7:15:31 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:15:31 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:15:32 PM	Tube furnace set to 0
6/27/2012	7:16:32 PM	Helium valve closed
6/27/2012	7:16:32 PM	H2 valve closed
6/27/2012	7:16:32 PM	BCl3 valve closed
6/27/2012	7:16:32 PM	PH3 valve closed
6/27/2012	7:16:32 PM	SiCl4 pre valve closed
6/27/2012	7:16:32 PM	SiCl4 post valve closed
6/27/2012	7:16:32 PM	Bypass valve closed
6/27/2012	7:16:32 PM	Bubbler valve closed
6/27/2012	7:16:32 PM	Main Vac valve opened
6/27/2012	7:16:32 PM	Helium MFC set to  0.000000
6/27/2012	7:16:32 PM	H2 MFC set to  0.000000
6/27/2012	7:16:32 PM	BCl3 MFC set to  0.000000
6/27/2012	7:16:32 PM	PH3 MFC set to  0.000000
6/27/2012	7:16:32 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:16:32 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:16:32 PM	Tube furnace set to 0
6/27/2012	7:16:33 PM	Run finished at 7:16 PM
6/27/2012	7:16:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	7:17:41 PM	Recipe started at 7:17 PM
6/27/2012	7:17:41 PM	Helium valve closed
6/27/2012	7:17:41 PM	H2 valve closed
6/27/2012	7:17:41 PM	BCl3 valve closed
6/27/2012	7:17:41 PM	PH3 valve closed
6/27/2012	7:17:41 PM	SiCl4 pre valve closed
6/27/2012	7:17:41 PM	SiCl4 post valve closed
6/27/2012	7:17:41 PM	Bypass valve closed
6/27/2012	7:17:41 PM	Bubbler valve closed
6/27/2012	7:17:41 PM	Main Vac valve opened
6/27/2012	7:17:41 PM	Helium MFC set to  0.000000
6/27/2012	7:17:41 PM	H2 MFC set to  0.000000
6/27/2012	7:17:41 PM	BCl3 MFC set to  0.000000
6/27/2012	7:17:41 PM	PH3 MFC set to  0.000000
6/27/2012	7:17:41 PM	SiCl4 MFC set to  0.000000
6/27/2012	7:17:41 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	7:17:41 PM	Tube furnace set to 0
6/27/2012	8:47:41 PM	Helium valve closed
6/27/2012	8:47:41 PM	H2 valve closed
6/27/2012	8:47:41 PM	BCl3 valve closed
6/27/2012	8:47:41 PM	PH3 valve closed
6/27/2012	8:47:41 PM	SiCl4 pre valve closed
6/27/2012	8:47:41 PM	SiCl4 post valve closed
6/27/2012	8:47:41 PM	Main Vac valve closed
6/27/2012	8:47:41 PM	Bypass valve closed
6/27/2012	8:47:41 PM	Bubbler valve closed
6/27/2012	8:47:41 PM	Helium MFC set to  0.000000
6/27/2012	8:47:41 PM	H2 MFC set to  0.000000
6/27/2012	8:47:41 PM	BCl3 MFC set to  0.000000
6/27/2012	8:47:41 PM	PH3 MFC set to  0.000000
6/27/2012	8:47:41 PM	SiCl4 MFC set to  0.000000
6/27/2012	8:47:41 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:47:41 PM	Tube furnace set to 0
6/27/2012	8:47:44 PM	Helium valve closed
6/27/2012	8:47:44 PM	BCl3 valve closed
6/27/2012	8:47:44 PM	PH3 valve closed
6/27/2012	8:47:44 PM	SiCl4 pre valve closed
6/27/2012	8:47:44 PM	SiCl4 post valve closed
6/27/2012	8:47:44 PM	Main Vac valve closed
6/27/2012	8:47:44 PM	Bypass valve closed
6/27/2012	8:47:44 PM	Bubbler valve closed
6/27/2012	8:47:44 PM	H2 valve opened
6/27/2012	8:47:44 PM	Helium MFC set to  0.000000
6/27/2012	8:47:44 PM	H2 MFC set to  500.000000
6/27/2012	8:47:44 PM	BCl3 MFC set to  0.000000
6/27/2012	8:47:44 PM	PH3 MFC set to  0.000000
6/27/2012	8:47:44 PM	SiCl4 MFC set to  0.000000
6/27/2012	8:47:44 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:47:44 PM	Tube furnace set to 0
6/27/2012	8:48:58 PM	Helium valve closed
6/27/2012	8:48:58 PM	BCl3 valve closed
6/27/2012	8:48:58 PM	PH3 valve closed
6/27/2012	8:48:58 PM	SiCl4 pre valve closed
6/27/2012	8:48:58 PM	SiCl4 post valve closed
6/27/2012	8:48:58 PM	Main Vac valve closed
6/27/2012	8:48:58 PM	Bypass valve closed
6/27/2012	8:48:58 PM	H2 valve opened
6/27/2012	8:48:58 PM	Bubbler valve opened
6/27/2012	8:48:58 PM	Helium MFC set to  0.000000
6/27/2012	8:48:58 PM	H2 MFC set to  500.000000
6/27/2012	8:48:58 PM	BCl3 MFC set to  0.000000
6/27/2012	8:48:58 PM	PH3 MFC set to  0.000000
6/27/2012	8:48:58 PM	SiCl4 MFC set to  0.000000
6/27/2012	8:48:58 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:48:58 PM	Tube furnace set to 0
6/27/2012	8:48:59 PM	Helium valve closed
6/27/2012	8:48:59 PM	BCl3 valve closed
6/27/2012	8:48:59 PM	PH3 valve closed
6/27/2012	8:48:59 PM	SiCl4 pre valve closed
6/27/2012	8:48:59 PM	SiCl4 post valve closed
6/27/2012	8:48:59 PM	Main Vac valve closed
6/27/2012	8:48:59 PM	Bypass valve closed
6/27/2012	8:48:59 PM	H2 valve opened
6/27/2012	8:48:59 PM	Bubbler valve opened
6/27/2012	8:48:59 PM	Helium MFC set to  0.000000
6/27/2012	8:48:59 PM	H2 MFC set to  500.000000
6/27/2012	8:48:59 PM	BCl3 MFC set to  0.000000
6/27/2012	8:48:59 PM	PH3 MFC set to  0.000000
6/27/2012	8:48:59 PM	SiCl4 MFC set to  0.000000
6/27/2012	8:48:59 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	8:48:59 PM	Tube furnace set to 1000
6/27/2012	9:13:59 PM	Helium valve closed
6/27/2012	9:13:59 PM	PH3 valve closed
6/27/2012	9:13:59 PM	Main Vac valve closed
6/27/2012	9:13:59 PM	Bypass valve closed
6/27/2012	9:13:59 PM	H2 valve opened
6/27/2012	9:13:59 PM	BCl3 valve opened
6/27/2012	9:13:59 PM	SiCl4 pre valve opened
6/27/2012	9:13:59 PM	SiCl4 post valve opened
6/27/2012	9:13:59 PM	Bubbler valve opened
6/27/2012	9:13:59 PM	Helium MFC set to  0.000000
6/27/2012	9:13:59 PM	H2 MFC set to  450.000000
6/27/2012	9:13:59 PM	BCl3 MFC set to  0.750000
6/27/2012	9:13:59 PM	PH3 MFC set to  0.000000
6/27/2012	9:13:59 PM	SiCl4 MFC set to  50.000000
6/27/2012	9:13:59 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	9:14:00 PM	Tube furnace set to 1000
6/27/2012	9:48:00 PM	Helium valve closed
6/27/2012	9:48:00 PM	BCl3 valve closed
6/27/2012	9:48:00 PM	PH3 valve closed
6/27/2012	9:48:00 PM	SiCl4 pre valve closed
6/27/2012	9:48:00 PM	SiCl4 post valve closed
6/27/2012	9:48:00 PM	Main Vac valve closed
6/27/2012	9:48:00 PM	Bypass valve closed
6/27/2012	9:48:00 PM	H2 valve opened
6/27/2012	9:48:00 PM	Bubbler valve opened
6/27/2012	9:48:00 PM	Helium MFC set to  0.000000
6/27/2012	9:48:00 PM	H2 MFC set to  500.000000
6/27/2012	9:48:00 PM	BCl3 MFC set to  0.000000
6/27/2012	9:48:00 PM	PH3 MFC set to  0.000000
6/27/2012	9:48:00 PM	SiCl4 MFC set to  0.000000
6/27/2012	9:48:00 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	9:48:00 PM	Tube furnace set to 750
6/27/2012	10:03:00 PM	H2 valve closed
6/27/2012	10:03:00 PM	BCl3 valve closed
6/27/2012	10:03:00 PM	PH3 valve closed
6/27/2012	10:03:00 PM	SiCl4 pre valve closed
6/27/2012	10:03:00 PM	SiCl4 post valve closed
6/27/2012	10:03:00 PM	Main Vac valve closed
6/27/2012	10:03:00 PM	Bypass valve closed
6/27/2012	10:03:00 PM	Helium valve opened
6/27/2012	10:03:00 PM	Bubbler valve opened
6/27/2012	10:03:00 PM	Helium MFC set to  500.000000
6/27/2012	10:03:00 PM	H2 MFC set to  0.000000
6/27/2012	10:03:00 PM	BCl3 MFC set to  0.000000
6/27/2012	10:03:00 PM	PH3 MFC set to  0.000000
6/27/2012	10:03:00 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:03:00 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:03:00 PM	Tube furnace set to 0
6/27/2012	10:23:00 PM	Helium valve closed
6/27/2012	10:23:00 PM	H2 valve closed
6/27/2012	10:23:00 PM	BCl3 valve closed
6/27/2012	10:23:00 PM	PH3 valve closed
6/27/2012	10:23:00 PM	SiCl4 pre valve closed
6/27/2012	10:23:00 PM	SiCl4 post valve closed
6/27/2012	10:23:00 PM	Main Vac valve closed
6/27/2012	10:23:00 PM	Bypass valve closed
6/27/2012	10:23:00 PM	Bubbler valve closed
6/27/2012	10:23:00 PM	Helium MFC set to  0.000000
6/27/2012	10:23:00 PM	H2 MFC set to  0.000000
6/27/2012	10:23:00 PM	BCl3 MFC set to  0.000000
6/27/2012	10:23:00 PM	PH3 MFC set to  0.000000
6/27/2012	10:23:00 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:23:00 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:23:00 PM	Tube furnace set to 0
6/27/2012	10:43:00 PM	Helium valve closed
6/27/2012	10:43:00 PM	H2 valve closed
6/27/2012	10:43:00 PM	BCl3 valve closed
6/27/2012	10:43:00 PM	PH3 valve closed
6/27/2012	10:43:00 PM	SiCl4 pre valve closed
6/27/2012	10:43:00 PM	SiCl4 post valve closed
6/27/2012	10:43:00 PM	Main Vac valve closed
6/27/2012	10:43:00 PM	Bubbler valve closed
6/27/2012	10:43:00 PM	Bypass valve opened
6/27/2012	10:43:00 PM	Helium MFC set to  0.000000
6/27/2012	10:43:00 PM	H2 MFC set to  0.000000
6/27/2012	10:43:00 PM	BCl3 MFC set to  0.000000
6/27/2012	10:43:00 PM	PH3 MFC set to  0.000000
6/27/2012	10:43:00 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:43:00 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:43:00 PM	Tube furnace set to 0
6/27/2012	10:43:52 PM	Helium valve closed
6/27/2012	10:43:52 PM	H2 valve closed
6/27/2012	10:43:52 PM	BCl3 valve closed
6/27/2012	10:43:52 PM	PH3 valve closed
6/27/2012	10:43:52 PM	SiCl4 pre valve closed
6/27/2012	10:43:52 PM	SiCl4 post valve closed
6/27/2012	10:43:52 PM	Main Vac valve closed
6/27/2012	10:43:52 PM	Bubbler valve closed
6/27/2012	10:43:52 PM	Bypass valve opened
6/27/2012	10:43:52 PM	Helium MFC set to  0.000000
6/27/2012	10:43:52 PM	H2 MFC set to  0.000000
6/27/2012	10:43:52 PM	BCl3 MFC set to  0.000000
6/27/2012	10:43:52 PM	PH3 MFC set to  0.000000
6/27/2012	10:43:52 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:43:52 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:43:53 PM	Tube furnace set to 0
6/27/2012	10:44:53 PM	Helium valve closed
6/27/2012	10:44:53 PM	H2 valve closed
6/27/2012	10:44:53 PM	BCl3 valve closed
6/27/2012	10:44:53 PM	PH3 valve closed
6/27/2012	10:44:53 PM	SiCl4 pre valve closed
6/27/2012	10:44:53 PM	SiCl4 post valve closed
6/27/2012	10:44:53 PM	Bypass valve closed
6/27/2012	10:44:53 PM	Bubbler valve closed
6/27/2012	10:44:53 PM	Main Vac valve opened
6/27/2012	10:44:53 PM	Helium MFC set to  0.000000
6/27/2012	10:44:53 PM	H2 MFC set to  0.000000
6/27/2012	10:44:53 PM	BCl3 MFC set to  0.000000
6/27/2012	10:44:53 PM	PH3 MFC set to  0.000000
6/27/2012	10:44:53 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:44:53 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:44:53 PM	Tube furnace set to 0
6/27/2012	10:51:03 PM	Run aborted at 10:51 PM
6/27/2012	10:51:03 PM	Helium valve closed
6/27/2012	10:51:03 PM	H2 valve closed
6/27/2012	10:51:03 PM	BCl3 valve closed
6/27/2012	10:51:03 PM	PH3 valve closed
6/27/2012	10:51:03 PM	SiCl4 pre valve closed
6/27/2012	10:51:03 PM	SiCl4 post valve closed
6/27/2012	10:51:03 PM	Bypass valve closed
6/27/2012	10:51:03 PM	Main Vac valve closed
6/27/2012	10:51:03 PM	Bubbler valve closed
6/27/2012	10:51:03 PM	Helium MFC set to  0.000000
6/27/2012	10:51:03 PM	H2 MFC set to  0.000000
6/27/2012	10:51:03 PM	BCl3 MFC set to  0.000000
6/27/2012	10:51:03 PM	PH3 MFC set to  0.000000
6/27/2012	10:51:03 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:51:03 PM	Tube furnace set to 0
6/27/2012	10:55:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	10:55:34 PM	Recipe started at 10:55 PM
6/27/2012	10:55:34 PM	Helium valve closed
6/27/2012	10:55:34 PM	H2 valve closed
6/27/2012	10:55:34 PM	BCl3 valve closed
6/27/2012	10:55:34 PM	PH3 valve closed
6/27/2012	10:55:34 PM	SiCl4 pre valve closed
6/27/2012	10:55:34 PM	SiCl4 post valve closed
6/27/2012	10:55:34 PM	Main Vac valve closed
6/27/2012	10:55:34 PM	Bypass valve closed
6/27/2012	10:55:34 PM	Bubbler valve closed
6/27/2012	10:55:34 PM	Helium MFC set to  0.000000
6/27/2012	10:55:34 PM	H2 MFC set to  0.000000
6/27/2012	10:55:34 PM	BCl3 MFC set to  0.000000
6/27/2012	10:55:34 PM	PH3 MFC set to  0.000000
6/27/2012	10:55:34 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:55:34 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:55:34 PM	Tube furnace set to 0
6/27/2012	10:55:37 PM	H2 valve closed
6/27/2012	10:55:37 PM	BCl3 valve closed
6/27/2012	10:55:37 PM	PH3 valve closed
6/27/2012	10:55:37 PM	SiCl4 pre valve closed
6/27/2012	10:55:37 PM	SiCl4 post valve closed
6/27/2012	10:55:37 PM	Main Vac valve closed
6/27/2012	10:55:37 PM	Bypass valve closed
6/27/2012	10:55:37 PM	Bubbler valve closed
6/27/2012	10:55:37 PM	Helium valve opened
6/27/2012	10:55:37 PM	Helium MFC set to  500.000000
6/27/2012	10:55:37 PM	H2 MFC set to  0.000000
6/27/2012	10:55:37 PM	BCl3 MFC set to  0.000000
6/27/2012	10:55:37 PM	PH3 MFC set to  0.000000
6/27/2012	10:55:37 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:55:37 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:55:37 PM	Tube furnace set to 0
6/27/2012	10:56:46 PM	Helium valve closed
6/27/2012	10:56:46 PM	H2 valve closed
6/27/2012	10:56:46 PM	BCl3 valve closed
6/27/2012	10:56:46 PM	PH3 valve closed
6/27/2012	10:56:46 PM	SiCl4 pre valve closed
6/27/2012	10:56:46 PM	SiCl4 post valve closed
6/27/2012	10:56:46 PM	Main Vac valve closed
6/27/2012	10:56:46 PM	Bypass valve closed
6/27/2012	10:56:46 PM	Bubbler valve closed
6/27/2012	10:56:46 PM	Helium MFC set to  0.000000
6/27/2012	10:56:46 PM	H2 MFC set to  0.000000
6/27/2012	10:56:46 PM	BCl3 MFC set to  0.000000
6/27/2012	10:56:46 PM	PH3 MFC set to  0.000000
6/27/2012	10:56:46 PM	SiCl4 MFC set to  0.000000
6/27/2012	10:56:46 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	10:56:46 PM	Tube furnace set to 0
6/27/2012	10:56:47 PM	Run finished at 10:56 PM
6/27/2012	10:56:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2012	11:06:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	11:06:18 PM	Recipe started at 11:06 PM
6/27/2012	11:06:18 PM	Helium valve closed
6/27/2012	11:06:18 PM	H2 valve closed
6/27/2012	11:06:18 PM	BCl3 valve closed
6/27/2012	11:06:18 PM	PH3 valve closed
6/27/2012	11:06:18 PM	SiCl4 pre valve closed
6/27/2012	11:06:18 PM	SiCl4 post valve closed
6/27/2012	11:06:18 PM	Main Vac valve closed
6/27/2012	11:06:18 PM	Bubbler valve closed
6/27/2012	11:06:18 PM	Bypass valve opened
6/27/2012	11:06:18 PM	Helium MFC set to  0.000000
6/27/2012	11:06:18 PM	H2 MFC set to  0.000000
6/27/2012	11:06:18 PM	BCl3 MFC set to  0.000000
6/27/2012	11:06:18 PM	PH3 MFC set to  0.000000
6/27/2012	11:06:18 PM	SiCl4 MFC set to  0.000000
6/27/2012	11:06:18 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:06:19 PM	Tube furnace set to 0
6/27/2012	11:07:30 PM	Helium valve closed
6/27/2012	11:07:30 PM	H2 valve closed
6/27/2012	11:07:30 PM	BCl3 valve closed
6/27/2012	11:07:30 PM	PH3 valve closed
6/27/2012	11:07:30 PM	SiCl4 pre valve closed
6/27/2012	11:07:30 PM	SiCl4 post valve closed
6/27/2012	11:07:30 PM	Main Vac valve closed
6/27/2012	11:07:30 PM	Bubbler valve closed
6/27/2012	11:07:30 PM	Bypass valve opened
6/27/2012	11:07:30 PM	Helium MFC set to  0.000000
6/27/2012	11:07:30 PM	H2 MFC set to  0.000000
6/27/2012	11:07:30 PM	BCl3 MFC set to  0.000000
6/27/2012	11:07:30 PM	PH3 MFC set to  0.000000
6/27/2012	11:07:30 PM	SiCl4 MFC set to  0.000000
6/27/2012	11:07:30 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:07:31 PM	Tube furnace set to 0
6/27/2012	11:08:31 PM	Helium valve closed
6/27/2012	11:08:31 PM	H2 valve closed
6/27/2012	11:08:31 PM	BCl3 valve closed
6/27/2012	11:08:31 PM	PH3 valve closed
6/27/2012	11:08:31 PM	SiCl4 pre valve closed
6/27/2012	11:08:31 PM	SiCl4 post valve closed
6/27/2012	11:08:31 PM	Bypass valve closed
6/27/2012	11:08:31 PM	Bubbler valve closed
6/27/2012	11:08:31 PM	Main Vac valve opened
6/27/2012	11:08:31 PM	Helium MFC set to  0.000000
6/27/2012	11:08:31 PM	H2 MFC set to  0.000000
6/27/2012	11:08:31 PM	BCl3 MFC set to  0.000000
6/27/2012	11:08:31 PM	PH3 MFC set to  0.000000
6/27/2012	11:08:31 PM	SiCl4 MFC set to  0.000000
6/27/2012	11:08:31 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:08:31 PM	Tube furnace set to 0
6/27/2012	11:08:32 PM	Run finished at 11:08 PM
6/27/2012	11:08:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2012	11:11:36 PM	Recipe started at 11:11 PM
6/27/2012	11:11:36 PM	Helium valve closed
6/27/2012	11:11:36 PM	H2 valve closed
6/27/2012	11:11:36 PM	BCl3 valve closed
6/27/2012	11:11:36 PM	PH3 valve closed
6/27/2012	11:11:36 PM	SiCl4 pre valve closed
6/27/2012	11:11:36 PM	SiCl4 post valve closed
6/27/2012	11:11:36 PM	Bypass valve closed
6/27/2012	11:11:36 PM	Bubbler valve closed
6/27/2012	11:11:36 PM	Main Vac valve opened
6/27/2012	11:11:36 PM	Helium MFC set to  0.000000
6/27/2012	11:11:37 PM	H2 MFC set to  0.000000
6/27/2012	11:11:37 PM	BCl3 MFC set to  0.000000
6/27/2012	11:11:37 PM	PH3 MFC set to  0.000000
6/27/2012	11:11:37 PM	SiCl4 MFC set to  0.000000
6/27/2012	11:11:37 PM	Bypass solenoid MFC set to  0.000000
6/27/2012	11:11:37 PM	Tube furnace set to 0
